Semiconductor Package Inspection System
GATS-7750 is an open/leak test equipment developed for further sophistication of FC-CSP. High speed and high accuracy test model.
- Achieved a total alignment accuracy +-2.5μm by high rigidity mechanical design
- Supported the inspection of thin substrate such as the coreless substrate
- Maximum work size
W150mm x D250mm (Working area: W140mm x D240mm)