Semiconductor Package Inspection System
GATS-7850 is a next generation open/leak inspection model which has been developed for 250mm sized square panel type of FC-CSP.
- Achieved a repeat accuracy +-2.5μm, and total aligment accuracy +-5.0μm
- Measuring of a warpage or deflection of the coreless substrate is available.
- Work size
W250mm x D250mm