Semiconductor Package Inspection System


GATS-6310 is a next generation inspection system, which is suitable for fine-pitched, ultrathin FP-CSP, fulilling both high speed and high accuracy requirements.

- Total Alignment Accuracy +-5.0μm, Tact time 0.6 seconds/piece

- Adopted a comact and light FLEX-type fixture

- Maximum work size
 W250mm x D150mm (Working area: W240mm x D140mm)