Semiconductor Package Inspection System


GATS-7750 is an open/leak test equipment developed for further sophistication of FC-CSP. High speed and high accuracy test model.

- Achieved a total alignment accuracy +-2.5μm by high rigidity mechanical design

- Supported the inspection of thin substrate such as the coreless substrate

- Maximum work size
 W150mm x D250mm (Working area: W140mm x D240mm)