Semiconductor Package Inspection System


GATS-7850 is a next generation open/leak inspection model which has been developed for 250mm sized square panel type of FC-CSP.

- Achieved a repeat accuracy +-2.5μm, and total aligment accuracy +-5.0μm

- Measuring of a warpage or deflection of the coreless substrate is available.

- Work size
 W250mm x D250mm